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Department Physical Metallurgy and Materials Testing Research Equipment Arc/sputter system Oerlikon Balzers INNOVA “Heidi“
Department Physical Metallurgy and Materials Testing Research Equipment Arc/sputter system Oerlikon Balzers INNOVA “Heidi“ | Arc/sputter system Oerlikon Balzers INNOVA “Heidi“ |
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The Oerlikon Balzers INNOVA (“Heidi”) is an industrial coating system for cathodic arc evaporation and sputtering, which is equipped with six arc and two sputter sources, enabling the deposition of conductive and non-conductive coatings.
In addition, the INNOVA etching technology can be used for substrate pre-treatment. The system is optimized to deposit hard coatings based on nitrides and oxides on tools and components. It is used within the Christian Doppler Laboratory for Advanced Hard Coatings (Link zu http://www.hardcoatings.ac.at ) for basic research, but also for applied research and for coating of prototypes. 
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